This book serves as a guide for practicing engineers, researchers, and students interested in MEMS devices that use biomaterials and biomedical applications. It is also suitable for engineers and researchers interested in MEMS and its applications but who do not have the necessary background in biomaterials. Biomaterials for MEMS highlights important features and issues of biomaterials that have been used in MEMS and biomedical areas. Hence this book is an essential guide for MEMS engineers or researchers who are trained in engineering institutes that do not provide the background or knowledge in biomaterials. The topics include fabrication of devices using biomaterials; biocompatible coatings and issues; thin-film biomaterials and MEMS for tissue engineering; and applications involving MEMS and biomaterials.